Laser Marking/Repair System Micro Point
It can be attached to existing microscopes for micro laser marking and micro laser processing.
- Can be attached to existing microscopes. - Marking on various materials with minimal wavelength dependence. - Minimum laser spot size of approximately 0.3 µm. - Marking is also possible on materials beneath transparent bodies or within transparent bodies. - Target marking as a preprocessing step for SEM, AFM, and FIB. By combining with an automatic stage and dedicated software, it is also possible to mark rectangles and characters. Additionally, marking can be done while reviewing defect maps from defect inspection devices such as KLA.
- Company：フォトニックインストゥルメンツ
- Price：5 million yen-10 million yen
